Antibacterial medical implant surface

ABSTRACT

Aspects include methods of fabricating antibacterial surfaces for medical implant devices including patterning a photoresist layer on a silicon substrate and etching the silicon to generate a plurality of nanopillars. Aspects also include removing the photoresist layer from the structure and coating the plurality of nanopillars with a biocompatible film. Aspects also include a system for preventing bacterial infection associated with medical implants including a thin silicon film including a plurality of nanopillars.

DOMESTIC PRIORITY

This application is a division of U.S. application Ser. No. 15/464,386,filed Mar. 21, 2017, the contents of which are incorporated by referenceherein in its entirety.

BACKGROUND

The present invention relates generally to medical implant devices and,more particularly, to bioinspired antibacterial surfaces for medicalimplant devices.

Bacterial infections associated with medical implants, such asorthopedic and dental implants, present an important challenge. Medicalimplants can be fabricated from a variety of materials and according todiverse methods. Bacteria can come into contact with medical implantsprior to or even during surgical implantation procedures in a variety ofmanners, for instance, due to incomplete or ineffective sterilization ofthe medical implant device, contamination from the patient such as thepatient's skin, contaminated disinfectants, or contaminants associatedwith surgical instruments. Films of bacterial cells can form across thesurface of medical devices after implantation. The potential for suchbiofilm-associated infections continuously increases as the worldpopulation ages and undergoes more frequent implantation procedures. Inmany cases, bacterial infections associated with medical implants arefirst detected in later stages of infection, where surgical interventionis the only option for treating the infection.

Methods to prevent infection associated with implants include alpharadiation and high temperature steam heating. However, these methods canonly reduce or eliminate bacteria present on the surface of theimplants. They cannot prevent bacteria from forming on the surface aftertreatment. Moreover, they cannot prevent bacterial contamination thatcan arise during the implantation procedure.

Surface texturing is a technique that can be used to increasebiocompatibility of medical implants. Known methods for manufacturingmedical devices with textured surfaces can produce random patterns ofstructures or can produce structures that are of a size and dimensionunsuitable for application to medical implant devices. A need remainsfor a long-lasting, reliable medical implant systems and methods toprevent formation of biofilms on implant devices.

SUMMARY

Embodiments of the invention are directed to a method of fabricating anantibacterial surface for medical implant devices. A non-limitingexample method includes patterning a photoresist layer on asemiconductor substrate. The substrate is etched using, for example,reactive ion etching to generate a plurality of nanopillars. Thephotoresist layer is removed from the substrate. The plurality ofnanopillars are coated with a biocompatible film. The above-describedfabrication method can produce controlled patterns of nanopillars withdimensions that promote bactericidal activity.

In some embodiments of the present invention, each of the plurality ofnanopillars has a top pillar diameter within a range from about 1nanometer to about 200 nanometers, a bottom pillar within a range fromabout 1 nanometer to about 1micrometer, and/or an average height withina range from about 100 nanometers to about 10 micrometers. Embodimentsof the invention with one or more of these dimensions can have increasedbactericidal activity relative to nanopillars of dimensions outside ofone or more of these ranges.

In some embodiments of the present invention, the biocompatible filmincludes titanium. Titanium and compounds containing titanium canprovide a film with relatively low cost, relatively easy fabrication,and desirable bactericidal activity.

Embodiments of the invention are directed to a method of fabricating amedical implant device. A non-limiting example of the method includesgenerating a thin film including a plurality of nanostructures. In someembodiments, generating a thin film having a plurality of nanostructuresincludes applying a tensile layer to the plurality of nanostructures tocause a fracture in the semiconductor substrate. Generating a thin filmalso includes separating the plurality of nanopillars from the substrateat the fracture in the substrate. The method of fabricating can providea silicon film including an antibacterial surface that is flexible andcan conform to a variety of surfaces, including the surface of a medicalimplant.

In accordance with another embodiment, a method of fabricating anantibacterial structure for a medical implant device includes patterninga photoresist layer on a semiconductor substrate. The method alsoincludes depositing a metal layer on the structure. The method alsoincludes removing the photoresist layer and a portion of the metal layerfrom the structure to create a patterned metal layer. The method alsoincludes etching the substrate under the patterned metal layer togenerate a plurality of nanopillars. The method also includes removingthe patterned metal layer from the structure. The method of fabricatingcan produce controlled patterns of nanopillars with dimensions thatpromote bactericidal activity at a reduced cost and with reduced use oftoxic chemicals.

In accordance with another embodiment, a system for preventing bacterialinfection associated with medical implants includes a thin silicon filmincluding a plurality of nanopillars. The system can prevent bacterialinfection associated with medical implants and enable adherence of humancells to the surface.

In accordance with one or more embodiments of the present invention,each of the plurality of nanopillars has a top pillar diameter within arange from about 1 nanometer to about 200 nanometers. Each of theplurality of nanopillars has a bottom pillar diameter within a rangefrom about 1 nanometer to about 1 micrometer. The plurality ofnanopillars has an average height within a range from about 100nanometers to about 10 micrometers. The plurality of nanopillars arespaced on the thin silicon film with an average pitch within a rangefrom about 100 nanometers to about 2 micrometers.

In accordance with yet another embodiment, a method for preventingbacterial infection associated with medical implant procedures isprovided. The method includes applying a silicon film to a medicalimplant device, wherein the silicon film includes a plurality ofnanopillars and a silicon base. The method also includes implanting themedical implant device in a patient. The method can prevent bacterialinfection post-implantation and, thereby, improve patient outcomes.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other features and advantages of the one or moreembodiments described herein are apparent from the following detaileddescription taken in conjunction with the accompanying drawings inwhich:

FIG. 1 is a cross-sectional view of an antibacterial surface for medicalimplant devices according to one or more embodiments of the presentinvention.

FIGS. 2A-2D illustrate an exemplary fabrication process of forming anantibacterial surface for medical implant devices according to one ormore embodiments of the present invention, in which:

FIG. 2A is a cross-sectional view of a silicon substrate afterpatterning a photoresist layer;

FIG. 2B is a cross-sectional view of the structure of FIG. 2A afteretching;

FIG. 2C is a cross-sectional view of the structure of FIG. 2B afterremoving the photoresist layer; and

FIG. 2D is a cross-sectional view of the structure of FIG. 2C afterdepositing a biocompatible material.

FIGS. 3A-3F illustrate another exemplary fabrication process of formingan antibacterial surface for medical implant devices according to one ormore embodiments of the present invention, in which:

FIG. 3A is a cross-sectional view of a silicon substrate afterpatterning a photoresist layer;

FIG. 3B is a cross-sectional view of the structure of FIG. 3A afterdepositing a metal;

FIG. 3C is a cross-sectional view of the structure of FIG. 3B afterremoving the photoresist layer;

FIG. 3D is a cross-sectional view of the structure of FIG. 3C afterconducting metal assisted chemical etching;

FIG. 3E is a cross-sectional view of the structure of FIG. 3D afterremoving the metal; and

FIG. 3F is a cross-sectional view of the structure of FIG. 3E afterdepositing a biocompatible material.

FIGS. 4A-4D illustrate a process for forming a thinned down siliconstructure including antibacterial nanopillars using a spallingtechnique, in which:

FIG. 4A is a cross sectional view of a substrate including antibacterialnanopillars;

FIG. 4B is a cross-sectional view of a silicon structure afterdeposition of a layer with tensile stress on a substrate;

FIG. 4C is a cross-sectional view of a silicon structure afterdeposition of a flexible handle on the layer with tensile stress; and

FIG. 4D is a cross-sectional view of a silicon structure after liftingthe layer with tensile stress to create a thin silicon ribbon includingantibacterial nanopillars.

DETAILED DESCRIPTION

Medical implant devices are becoming more prevalent with the advent ofnew technologies for treatment of ailments associated with disease andaging. However, complete sterilization of the implanted devices throughconventional means is difficult, resulting in the introduction ofinfectious materials into the body along with a surface that can providea bacterial substrate for the formation of a biofilm. Such biofilms cannot only result in potentially serious infections and illness, but alsofrequently require surgical intervention to remove the infectiousmaterial from the body. In addition, growth of bacterial films on thesurface of implanted medical devices, including for instance pacemakersand orthopedic implants, can also block proper operation of the devices,sometimes leading to device malfunction.

There is a need to reduce or eliminate bacterial infection associatedwith medical devices to improve patient outcomes. Specialconsiderations, such as biocompatibility, can be needed to preventinfections. Conventional methods for reducing such infections caninclude increasingly aggressive sterilization procedures, such as alpharadiation and high temperature steam heating. However, such methods aredirected primarily to eliminating the presence of contaminants on themedical device prior to implantation and do not address other methods ofcontamination, such as during surgery, or bacterial growth aftercontamination.

Although propagation of bacterial cells on an implant surface is highlyundesirable, some medical implant applications can benefit fromattachment and propagation of human tissue on the implant surface. Forexample, adherence of muscle tissue to structural orthopedic implantscan improve device functionality. In some cases, failure of muscletissue to adhere to implanted medical devices can result in such poorprognosis that repeated surgical procedures are necessary.

Embodiments of the present invention include medical implant deviceswith anti-bacterial surfaces. Some embodiments of the invention providemethods of preventing bacterial film formation on medical implants.Embodiments of the present invention can provide medical implant devicesthat allow human cell adherence or growth on the device surface whileprohibiting bacterial cell growth. In some embodiments of the presentinvention, patient treatment outcomes are improved, for instance byreducing risk of infection and subsequent surgical procedures. Inaddition, in some embodiments, the invention improves the functioningand longevity of medical implant devices.

Embodiments of the invention include a nanostructured surface formedical implant devices. In some embodiments, the nanostructured surfacecan be coated with bio-compatible materials. In some embodiments, thenanostructured surfaces of the invention prevent bacterial filmformation. In some embodiments, the nanostructured surfaces of theinvention allow growth of human cells. In some embodiments of theinvention, nanopillar surfaces with controlled dimensions are provided.Fabrication of nanopillar surfaces with controlled dimensions canprovide enhanced bactericidal activity in comparison with randomlyordered nanopillar surfaces.

Embodiments of the invention include improved methods of nanopillarsurface formation. Methods according to some embodiments of the presentinvention provide nanopillar spikes with relatively small dimensions,providing enhanced bactericidal activity in comparison with nanopillarsof larger dimensions.

Deposition is any process that grows, coats, or otherwise transfers amaterial onto a substrate. Available technologies include, but are notlimited to, thermal oxidation, physical vapor deposition (PVD), chemicalvapor deposition (CVD), electrochemical deposition (ECD), molecular beamepitaxy (MBE) and more recently, atomic layer deposition (ALD) amongothers.

Removal is any process that removes material from the wafer: examplesinclude etch processes (either wet or dry), and chemical-mechanicalplanarization (CMP), etc.

Patterning is the shaping or altering of deposited materials, and isgenerally referred to as lithography. For example, in conventionallithography, the wafer is coated with a chemical called a photoresist;then, a machine called a stepper focuses, aligns, and moves a mask,exposing select portions of the wafer below to short wavelength light;the exposed regions are washed away by a developer solution. Afteretching or other processing, the remaining photoresist is removed.Patterning also includes deep ultra violet lithography, electron-beamlithography, nanoimprint lithography, nanosphere lithography, andreactive ion etching.

The etching process can include a dry etch (e.g., reactive ion etching,plasma etching, ion beam etching, or laser ablation). The etchingprocess can alternatively include a wet chemical etch (e.g., withpotassium hydroxide, or sulfuric acid and hydrogen peroxide). In someexemplary embodiments, both dry etching and wet chemical etchingprocesses can be used. After transferring the pattern, the patternedphotoresist is removed utilizing resist stripping processes, forexample, ashing. Ashing can be used to remove a photoresist material,amorphous carbon, or organic planarization (OPL) layer. Ashing isperformed using a suitable reaction gas, for example, O2, N2, H2/N2, O3,CF4, or any combination thereof

The following definitions and abbreviations are to be used for theinterpretation of the claims and the specification. As used herein, theterms “comprises,” “comprising,” “includes,” “including,” “has,”“having,” “contains” or “containing,” or any other variation thereof,are intended to cover a non-exclusive inclusion. For example, acomposition, a mixture, process, method, article, or apparatus thatcomprises a list of elements is not necessarily limited to only thoseelements but can include other elements not expressly listed or inherentto such composition, mixture, process, method, article, or apparatus.

As used herein, the articles “a” and “an” preceding an element orcomponent are intended to be nonrestrictive regarding the number ofinstances (i.e. occurrences) of the element or component. Therefore, “a”or “an” should be read to include one or at least one, and the singularword form of the element or component also includes the plural unlessthe number is obviously meant to be singular.

Turning now to a more detailed description of embodiments of the presentinvention, FIG. 1 is a cross-sectional view of an antibacterial surface100 for medical implant devices according to one or more embodiments ofthe present invention. The antibacterial surface 100 can include asemiconductor substrate 102, such as a silicon substrate, and aplurality of nanopillars 104. In some embodiments, the substrate 102 andnanopillars 104 are formed of the same material and include silicon or asilicon compound. Each nanopillar includes a top surface 108. The topsurface 108 of each nanopillar has a top diameter Dl. The bottom of eachnanopillar at its widest point has a bottom diameter D2. The nanopillarseach have a height H. In some embodiments, the nanopillars 104 arespaced from each other of a distance defined by a pitch. The pitch isthe distance from a leading edge of a first nanopillar to the leadingedge of a second nanopillar, where the second nanopillar is the nextneighboring nanopillar on the substrate 102. In some embodiments, thesubstrate 102 and nanopillars 104 are optionally coated with abio-compatible film 106.

In some embodiments, one or more nanopillars has a top pillar diameterD1 that is within a range from about 1 nanometer (nm) to about 200 nm.In some embodiments, D1 is within a range from about 1 nm to about 150nm, such as from about 1 nm to about 100 nm, or from about 10 nm toabout 80 nm. In some embodiments, the average diameter on theantibacterial surface D1 is about 50 nm to about 80 nm.

In some embodiments, one or more nanopillars has a bottom pillardiameter D2 that is within a range from about 1 nm to about 1000 nm. Insome embodiments, D2 is from about 50 nm to about 500 nm, such as fromabout 100 nm to about 400 nm, or from about 100 nm to about 200 nm. Insome embodiments, the average diameter D2 of the nanopillars on theantibacterial surface 100 is within a range from about 100 nm to about150 nm.

In some embodiments, plurality of nanopillars are spaced on thesubstrate according to a pitch. In some embodiments, the average pitchof the nanopillars 104 on the antibacterial surface 100 is within arange from about 100 nm to about 2 micrometers (μm). In some embodimentsthe average pitch is within a range from about 100 nm to about 1000 nm,such as from about 100 nm to about 500 nm, or from about 200 nm to about500 nm. In some embodiments, the average pitch is within a range fromabout 400 nm to about 450 nm.

In some embodiments, one or more nanopillars has a height H of thenanopillars H is within a range from about 100 nm to about 10 μm. Insome embodiments, the height is within a range from about 100 nm toabout 1 μm, or from about 200 nm to about 800 nm, or from about 300 nmto about 700 nm, or from about 400 nm to about 600 nm. In someembodiments, the average height of the nanopillars 104 on theantibacterial surface 100 is within a range from about 400 nm to about500 nm.

Biocompatible film 106 is a layer including a bio-compatible materialthat can be applied to the nanopillars and substrate of an antibacterialsurface. Biocompatible film 106 can include, for instance, nitrides,oxides, including metallic oxides, metallic hydroxides, nanoporousinorganic coatings, such as hydroxyapatite and calcium phosphatecompounds, and polymers, including natural polymers and syntheticpolymers. In some embodiments, biocompatible film 106 includes, forexample, aluminum oxide, hydroxyapatite, silicon dioxide, titaniumcarbide, titanium nitride, titanium dioxide, zirconium dioxide, calciumphosphate, chromium nitride, collagen, chitosan, cellulose or cellulosederivatives, poly-/-lactic acid (PLLA), poly(ε-caprolactone) (PCL),poly(lactide-co-glycolide) (PLGA), poly(ether imide) (PEI),poly(1,3-trimethylene carbonate) (PTMC), poly(styrene sulfonate) (PSS),or combinations thereof. In some embodiments of the invention,biocompatible film 106 includes a conductive metal, including, but notlimited to, platinum, silver, aluminum, nickel, titanium, or alloysthereof. In some embodiments, the biocompatible layer 106 is composed oftitanium (Ti). In some embodiments, the biocompatible layer 106 iscomposed of titanium nitride (TiN).

FIGS. 2A-2D illustrate an exemplary fabrication process of forming anantibacterial surface for medical implant devices according to one ormore embodiments of the present invention. FIG. 2A is a cross-sectionalview of a silicon substrate 200 after patterning a photoresist layer202. As is shown in FIG. 2A, a silicon substrate 200 can be provided anda photoresist layer 202 can be patterned on the substrate 200, leavingthe substrate 200 exposed for subsequent etching and nanopillarformation. The photoresist layer can be patterned with any suitablenanolithography technique, such as electron-beam lithography, deep ultraviolet (UV) photolithography, nanosphere lithography, or nanoimprinttechnology.

FIG. 2B is a cross-sectional view of the structure of FIG. 2A afteretching. The exposed or unmasked regions of the silicon substrate 200can be etched, for example, with reactive ion etching (ME) to a desireddepth. The desired depth can depend upon the desired height of theresultant nanopillars. Etching can result in a plurality of nanopillars204 on a silicon base 206. The nanopillars 204 and silicon base 206 canbe formed of the silicon substrate 200. Each of the nanopillars 204 canbe capped by the photoresist layer 202.

After etching the silicon substrate 200, the photoresist layer 202 canbe removed from the structure by known techniques. FIG. 2C is across-sectional view of the structure of FIG. 2B after removing thephotoresist layer. The resultant structure can include a plurality ofnanopillars 204 and silicon base 206, each formed of the siliconsubstrate 200, having the desired dimensions.

In some embodiments, after removing the photoresist layer, the structurecan be coated with a layer of biocompatible film 208. FIG. 2D is across-sectional view of the structure of FIG. 2C after depositing abiocompatible film 208. The biocompatible film 208 can be deposited byknown methods, for instance, by chemical vapor deposition (CVD) oratomic layer deposition (ALD). In some embodiments of the presentinvention, biocompatible film 208 is deposited utilizing a method whichforms a conformal coating on the exposed surfaces of substrate 200,including the exposed surfaces of features 204 and 206.

FIGS. 3A-3F illustrate another exemplary fabrication process of formingan antibacterial surface for medical implant devices according to one ormore embodiments of the present invention. The process can includepatterning a photoresist layer 202 on a silicon substrate 200. FIG. 3Ais a cross-sectional view of a silicon substrate after patterning aphotoresist layer 202.

After patterning a photoresist layer, metal-assisted chemical etchingcan be performed to create a plurality of nanopillars according to oneor more embodiments of the present invention. FIG. 3B is across-sectional view of the structure of FIG. 3A after depositing ametal layer 210. As is illustrated a metal layer 210 can be deposited onthe structure on top of the photoresist layer 202 and the exposedregions of the silicon substrate 200.

The metal layer 210 can include any metal suitable for metal-assistedchemical etching, such as gold, silver, platinum, tungsten, palladium,copper, aluminum, titanium, nickel, iron, zinc, cadmium, indium, tin,antimony, tellurium, lead, bismuth, vanadium, chromium, manganese,ruthenium, or molybdenum. In some embodiments, the metal 210 includesgold.

After depositing the metal layer 210 on the structure, the photoresistlayer and associated metal can be removed from the structure, leavingmetal layer 210 in a pattern suitable for producing nanopillars of thedesired dimensions. FIG. 3C is a cross-sectional view of the structureof FIG. 3B illustrating a silicon substrate 200 and patterned metallayer 210 after removing the photoresist layer.

FIG. 3D is a cross-sectional view of the structure of FIG. 3C afterconducting metal assisted chemical etching. Methods and etchantssuitable for metal-assisted chemical etching (MacEtch) are known. Forexample, the silicon 200 under the metal 210 can be etched with fluorideetchant, such as hydrofluoric acid, and an oxidizing agent, such ashydrogen peroxide. MacEtch can include, for example, inducing localoxidation and reduction reactions with noble metals, such as gold orplatinum, deposited on the surface of a semiconductor material. Suchreactions can be locally restricted to the interface between metal andsemiconductor. MacEtch can be a desirable alternative to reactive ionetching, for example, because it can be less costly than reactive ionetch procedures and can, in some cases, consume less energy, and in somecases also reduce exposure and handling of toxic materials.

According to some embodiments of the present invention, after etching,the metal can be removed from the structure. FIG. 3E is across-sectional view of the structure of FIG. 3D after removing thepatterned metal layer. As is illustrated, nanopillars 204 can be formedfrom the substrate 200 with desired dimensions.

In some embodiments, after removing the metal, a biocompatible film canbe deposited on the structure. FIG. 3F is a cross-sectional view of thestructure of FIG. 3E after depositing a biocompatible film 208.

For example, FIGS. 4A-4D illustrate one known process for forming athinned down silicon structure including antibacterial nanopillars usinga controlled spalling technique. As shown in FIG. 4A, a siliconstructure including antibacterial nanopillars 300 is provided. As isshown in FIG. 4B, a layer with tensile stress 302 can be deposited onthe structure 300. Layer with tensile stress, or tensile layer 302, canbe a layer of metal under tensile strain, for instance tensile strainedNi. Tensile layer 302 can include any material useful for spalling athin silicon ribbon from a silicon substrate, such as tensile stressedmetal or metal alloy.

The tensile layer 302 can cause a fracture in the silicon structure 300.Next, as shown in FIG. 4C, a flexible handle layer 304 can be disposedon the tensile layer. The flexible handle 304 can include, for example aplastic or metal foil that is operatively associated with, i.e., glued,adhered, or bonded to the tensile layer. Then, as shown in FIG. 4D, aknown spalling technique can include lifting the tensile layer 302 bymeans of the attached flexible handle 304 separate the plurality ofnanopillars from the silicon substrate at the fracture on the siliconsubstrate to create a thin layer of silicon ribbon includingantibacterial nanopillars from substrate 300.

In some embodiments of the present invention, the thin silicon ribbonincluding antibacterial nanopillars has a thickness within a range fromabout 1 microns to about 100 microns. In some embodiments of the presentinvention, the thin silicon ribbon including antibacterial nanopillarshas a thickness of less than 50 microns.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments described herein. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdescribed herein.

What is claimed is:
 1. A system for preventing bacterial infectionassociated with medical implant procedures, comprising: a silicon filmcomprising a plurality of nanopillars and a silicon base, wherein: eachof the plurality of nanopillars has a top pillar diameter within a rangefrom about 1 nanometer to about 200 nanometers; each of the plurality ofnanopillars has a bottom pillar diameter within a range from about 1nanometer to about 1 micrometer; the plurality of nanopillars has anaverage height within a range from about 100 nanometers to about 10micrometers; and the plurality of nanopillars are spaced on the siliconfilm with an average pitch within a range from about 100 nanometers toabout 2 micrometers.
 2. The system according to claim 1, furthercomprising a biocompatible film.
 3. The system according to claim 2,wherein the biocompatible film coats a surface of the plurality ofnanopillars.
 4. The system according to claim 2, wherein thebiocompatible film comprises titanium.
 5. The system according to claim2, wherein the biocompatible film forms a conformal coating on theplurality of nanopillars.
 6. The system according to claim 2, whereinthe biocompatible film comprises a conductive metal.
 7. The systemaccording to claim 6, wherein the biocompatible film comprises platinum,silver, aluminum, nickel, titanium, or alloys thereof
 8. The systemaccording to claim 2, wherein the biocompatible film comprises aluminumoxide, hydroxyapatite, silicon dioxide, titanium carbide, titaniumnitride, titanium dioxide, zirconium dioxide, calcium phosphate,chromium nitride, collagen, chitosan, cellulose or cellulosederivatives, poly-/-lactic acid (PLLA), poly(ε-caprolactone) (PCL),poly(lactide-co-glycolide) (PLGA), poly(ether imide) (PEI),poly(1,3-trimethylene carbonate) (PTMC), poly(styrene sulfonate) (PSS),or combinations thereof
 9. The system according to claim 2, wherein thebiocompatible film comprises nitrides, oxides, metallic oxides, metallichydroxides, nanoporous inorganic coatings, natural polymers, syntheticpolymers, or a combinations thereof
 10. The system according to claim 2,wherein the biocompatible film comprises titanium nitride.
 11. Thesystem according to claim 1, wherein the silicon base has a thickness ofless than or equal to about 100 micrometers.
 12. The system according toclaim 1, wherein each of the plurality of nanopillars has a top pillardiameter within a range from about 1 nanometer to about 200 nanometers.13. The system according to claim 1, wherein each of the plurality ofnanopillars has a bottom pillar diameter within a range from about 1nanometer to about 1 micrometer.
 14. The system according to claim 1,wherein the plurality of nanopillars has an average height within arange from about 100 nanometers to about 10 micrometers.
 15. The systemaccording to claim 1, wherein the plurality of nanopillars are spaced onthe silicon substrate with an average pitch within a range from about100 nanometers to about 2 micrometers.
 16. The system according to claim1, wherein the silicon film has a thickness of about 1 micron to about100 microns.
 17. The system according to claim 1, wherein the siliconfilm is flexible.
 18. The system according to claim 1, wherein thesilicon film is adhered to a surface of a medical implant device. 19.The system according to claim 18, wherein the medical implant deviceallows human cell adherence or growth.
 20. The system according to claim1, wherein the silicon film has a thickness of less than 50 micrometers.